TP39 - Nanoimprint lithography for multiple cavity height Fabry-Perrot filter array from two-level master
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Poster II
- Chapter
- Novel Technologies and Applications of Sensors
- Author(s)
- C. Fleury, B. Kalas, B. Realista-Ferreira, R. Nallagatla, M. Azeem, M. Garg, B. Mareddi, T. D. Dao - Silicon Austria Labs GmbH, Graz (Austria), P. Schuster, M. Preuß, V. Lingel - EV Group E. Thallner GmbH, St. Florian am Inn (Austria)
- Pages
- 432 - 433
- DOI
- 10.5162/EUROSENSORS2025/TP39
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
We demonstrate the design, fabrication and testing of a Fabry-Perrot filter array that can be adapted as an optical element in front of a sensor array. The technique uses nanoimprint lithography with a simple two-level master. The thickness of resin needed for each cavity is designed to match the resonant wavelength. Leveraging the local resin volume conservation, a modulation of the residual layer thickness is obtained by fill-factor engineering. The device is validated by transmission spectroscopy across the visible range.