B15-a1 - Laser Micromachining For Fabrication Of Low Frequency Single Crystal Piezocomposites
- Event
- 2025 ICU PADERBORN - 9th International Congress on Ultrasonics
2025-09-21 - 2025-09-25
Paderborn - Band
- Lectures
- Chapter
- B15-a - Ultrasound Transducers for Medical Uses
- Author(s)
- T. Trittler, J. Kober, J. Hampe, M. Herzog - Dresden University of Technology, Dresden (Germany), C. Endisch - SITEC Industrietechnologie GmbH, Chemnitz (Germany), S. -G. Lee - iBULe Photonics Co. Ltd, Incheon (Republic of Korea), S. Walter, H. Heuer - Fraunhofer IKTS, Dresden (Germany)
- Pages
- 174 - 177
- DOI
- 10.5162/Ultrasonic2025/B15-a1
- ISBN
- 978-3-910600-08-9
- Price
- free
Abstract
This study investigates laser micromachining of the piezoelectric single crystal material PMN-PT for fabrication of piezocomposites below 20 MHz center frequency. Simulation reveals a drop of thickness coupling coefficient for decreasing wall angles, which are to be expected from such a process. However, absolute pressure output and bandwidth increase due to improved impedance matching resulting from a gradient of acoustic impedance. 2-2 piezocomposite samples were micromachined with depths of 130 µm and further processed to functioning piezocomposites with 8.78 MHz and 10.58 MHz center frequency.