C2-a2 - 3D imaging with Scanning Acoustic Microscopy – A comparison of the focusing capabilities of array transducers and Synthetic Aperture with highly focused transducers.
- Event
- 2025 ICU PADERBORN - 9th International Congress on Ultrasonics
2025-09-21 - 2025-09-25
Paderborn - Band
- Lectures
- Chapter
- C2-a - Acoustic Microscopy
- Author(s)
- M. Wolf, E. Leipner, C. Kupsch - TU Bergakademie Freiberg, Freiberg (Germany), S. König, P. Hoffrogge, P. Czurratis - PVA TePla Analytical Systems, Westhausen (Germany)
- Pages
- 190 - 193
- DOI
- 10.5162/Ultrasonic2025/C2-a2
- ISBN
- 978-3-910600-08-9
- Price
- free
Abstract
This paper investigates the potential of Scanning Acoustic Microscopy (SAM) for 3D inspection of modern electronic devices using a single scan. Two complementary approaches to focus on different internal interfaces are examined: the Synthetic Aperture Focusing Technique (SAFT) utilizing a conventional SAM transducer and beamforming applied on an annular array transducer. A detailed comparison of both methods is presented. The image evaluation reveals that the SAFT approach delivers superior performance in terms of resolution and clarity.