7.3.2 - Improved Angle Sensing by Shape-from-Motion Calibration of 3D Magnetic Sensors

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Lectures

Chapter

Sensor Fundamentals & Modelling

Author(s)

B. Kar, P. Rutquist, O. Paul - University of Freiburg,Freiburg (Germany)

Pages

238 - 239

DOI

10.5162/eurosensors2026/7.3.2

ISBN

978-3-910600-12-6

Price

free

Abstract

Two-dimensional (2D) nanoelectromechanical system (NEMS) resonators, which offer high sensitivity, show strong potential for sensing applications. Among them, the fundamental mode is typically used as the operating mode for detecting external physical quantities such as pressure, mass, and force. Operating in this mode maximizes the sensor's displacement amplitude, which translates to a stronger output signal and enhanced overall sensitivity. However, a comprehensive and systematic understanding of how to identify the working mode is still lacking. In this work, we analyze how the width-to-length aspect ratio affects the ordering of resonant modes in doubly clamped 2D MoS₂ NEMS resonators. Through finite element method (FEM) simulation, the longitudinal fundamental mode remains largely insensitive to device width, whereas the eigenfrequencies of transverse modes vary strongly with aspect ratio. This leads to clarify mode-crossing events and a reordering of the overall mode sequence.