Tu-SFM-02 - PMUT and CMUT array – Design, technology and experimental validation

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Poster

Chapter

Sensor Fundamentals & Modelling

Author(s)

A. Shaporin, A. R. Dudhat, S. Mulay, C. Stöckel - Fraunhofer ENAS,Chemnitz (Germany), R. Nagaraja, A. Tweedie, A. Halbach - Quanscient,Tampere (Finland)

Pages

676 - 677

DOI

10.5162/eurosensors2026/Tu-SFM-02

ISBN

978-3-910600-12-6

Price

free

Abstract

This work focuses on the design and analysis of piezoelectric micromachined ultrasonic transducers (PMUTs) and capacitive micromachined ultrasonic transducers (CMUTs). Both device types are designed and simulated using finite element methods (FEM). In addition, fabricated microsystems are experimentally characterized to compare design target specifications with measured results.