Tu-SFM-03 - A Metasurface Acoustic Fabry-Perot Interferometer for Ultrasonic Passive Strain Sensing

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Poster

Chapter

Sensor Fundamentals & Modelling

Author(s)

S. Bielefeldt, C. Hierold, M. Luisier, C. Roman - ETH Zurich,Zürich (Schweiz), R. Furrer - Empa,Dübendorf (Schweiz)

Pages

678 - 679

DOI

10.5162/eurosensors2026/Tu-SFM-03

ISBN

978-3-910600-12-6

Price

free

Abstract

We propose a passive strain sensor concept based on a Fabry-Perot interferometer. Its two partially transmitting acoustic mirrors consist of air-channel metasurfaces embedded in PDMS. Finite element simulations are used to design the sensor and its acoustic spectral response for 5 MHz ultrasound interrogation. This sensor exhibits an average reflectance 2.9× (9.3 dB) higher compared to a PDMS monolayer, and a gauge factor of 0.48. Further simulations of lateral channel misalignment and noncircular channel cross-sections confirm the robustness of the design to fabrication variations.