P1.2 Closed-loop control of quasi-static MOEMS mirrors
- 16. GMA/ITG-Fachtagung Sensoren und Messsysteme 2012
2012-05-22 - 2012-05-23
- P1 Mechanische und akustische Sensoren
- D. Holzmann, M. Lenzhofer, A. Tortschanoff - CTR Carinthian Tech Research AG, Villach (Österreich)
- 702 - 706
A discrete closed-loop control system for fast and accuratepositioning of micro-opto-electromechanical (MOEMS) mirrors is presented is this paper,with special focus on electromagnetically driven quasi-static devices. Through simplified modeling, classic linear control methods can be used for the basically non-linear mirrors. A microcontroller based discrete implementation of the control loop gives flexibility in design and adjustment of different controllers. Compared to openloop, the settling time can be reduced by a factor of 30 using the closed-loop controller.