1.1.4 SiC-based MIS gas sensor for CO detection in very high water vapor environments
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
- 1.1 High Temperature Gas Sensors I
- O. Casals, A. Romano-Rodriguez - Universitat de Barcelona (UB), MIND-IN2UB-Department of Electronics (Spain), T. Becker - EADS Innovation Works (Germany); P. Godignon, Institut de Microelectrònica de Barcelona (Spain)
- 72 - 75
Due to their feasibility to operate at high temperature in environments with extremely high concentrations of water vapor (up to 45% by volume ratio to nitrogen), SiC-based MIS (Metal-Insulator-Semiconductor) capacitors are good candidates to monitor the presence of CO in the exhaust gases of hydrogen- or hydrocarbon-based fuel cells. In this work, we show that these devices are able to detect down to 2 ppm of CO and that their response is hardly affected by the presence of high concentrations of CO2 or by extremely high water vapor concentrations in pure nitrogen.