1.2.4 Gas-Assisted Focused Ion Beam Fabrication of Gold Nanoelectrode Arrays in Electron-Beam Evaporated Alumina Films for Biosensing Applications
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
- 1.2 Biosensors I
- N. Triroj - Department of Electrical Engineering, Faculty of Engineering, Khon Kaen University (Thailand), P. Jaroenapibal - Department of Industrial Engineering, Faculty of Engineering, Khon Kaen University (Thailand), R. Beresford - Division of Engineering, Brown University (USA)
- 88 - 91
This work reports the fabrication details used to prepare gold nanoelectrode arrays in alumina substrates. The fabrication steps include electron-beam evaporation of 20-nm Ti and 300-nm thick Au for the electrode platform on a glass substrate, followed by electron-beam evaporation of 800-nm thick Al2O3 as a passivation layer. I2-assisted focused ion beam (FIB) milling is employed to create high-aspect-ratio pores in the alumina films. The final pore size of 60-120 nm is achieved by ion beam sculpting after the initial milling process. The nanopores are then filled with Au via electrodeposition to obtain a nanoelectrode structure. Cyclic voltammetry (CV) responses of a standard redox species exhibit a nonclassical behavior of which a well-defined steady-state limiting current plateau is not observed.