1.2.4 Gas-Assisted Focused Ion Beam Fabrication of Gold Nanoelectrode Arrays in Electron-Beam Evaporated Alumina Films for Biosensing Applications

Event
14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany
Chapter
1.2 Biosensors I
Author(s)
N. Triroj - Department of Electrical Engineering, Faculty of Engineering, Khon Kaen University (Thailand), P. Jaroenapibal - Department of Industrial Engineering, Faculty of Engineering, Khon Kaen University (Thailand), R. Beresford - Division of Engineering, Brown University (USA)
Pages
88 - 91
DOI
10.5162/IMCS2012/1.2.4
ISBN
978-3-9813484-2-2
Price
free

Abstract

This work reports the fabrication details used to prepare gold nanoelectrode arrays in alumina substrates. The fabrication steps include electron-beam evaporation of 20-nm Ti and 300-nm thick Au for the electrode platform on a glass substrate, followed by electron-beam evaporation of 800-nm thick Al2O3 as a passivation layer. I2-assisted focused ion beam (FIB) milling is employed to create high-aspect-ratio pores in the alumina films. The final pore size of 60-120 nm is achieved by ion beam sculpting after the initial milling process. The nanopores are then filled with Au via electrodeposition to obtain a nanoelectrode structure. Cyclic voltammetry (CV) responses of a standard redox species exhibit a nonclassical behavior of which a well-defined steady-state limiting current plateau is not observed.

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