2.4.3 Structural Factors Influencing the Volatile Sensitivity of Polymer Coated Piezoelectric Micromechanical Resonators
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- 2.4 Resonant Sensors I
- Author(s)
- L. Sieben-Xu, D. Karabacak, D. Wouters, W. Knoben, Y. van Andel, S. Brongersma, M. Calmama - Holst Centre/imec the Netherlands (The Netherlands)
- Pages
- 213 - 216
- DOI
- 10.5162/IMCS2012/2.4.3
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
Polymer-coated piezoelectric microbridge resonators were demonstrated to be highly sensitive towards volatile organic compounds. Here, we present a comprehensive experimental study into several important factors governing the modal sensitivity, namely the modal resonance frequency, piezoelectric transducer size, and functionalization layer thickness. Results indicate the lower frequency length flexural modes yield higher normalized frequency shifts in comparison to higher order width-flexural or torsional modes. The sensitivity of resonator sensors can be further enhanced by reducing the piezoelectric patch size and increasing the thickness of polymer.