3.4.2 New planar trace humidity sensor
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- 3.4 Sensor Systems
- Author(s)
- C. Tiebe, T. Hübert - BAM Federal Institute for Materials Research and Testing (Germany), A. Lorek - German Aerospace Center (DLR) (Germany), R. Wernecke - dr. wernecke Feuchtemesstechnik GmbH (Germany)
- Pages
- 294 - 297
- DOI
- 10.5162/IMCS2012/3.4.2
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
A new planar sensor element for continuous coulometric trace humidity measurements in industrial gases has been developed. In order to ensure precise measurements a calibration facility including a precision dew point hygrometer as a reference device was developed. The sensor can measure the humidity in the frost point temperature range of -20 °C to -80 °C and has an expanded uncertainty of 2 K, a fast reaction time and a settling time of the entire system from 15 to 30 min.