8.4.2 Gas Sensing Properties of Novel CuO Nanowire Devices
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- 8.4 Nanowire-based Sensors
- Author(s)
- S. Steinhauer, E. Brunet, T. Maier, G. Mutinati, A. Köck - AIT Austrian Institute of Technology GmbH (Austria), O. Freudenberg - Siemens AG, Corporate Technology, Corporate Research and Technologies (Germany)
- Pages
- 713 - 716
- DOI
- 10.5162/IMCS2012/8.4.2
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
We report on novel gas sensing devices which are realized by the on-chip synthesis of cupric oxide (CuO) nanowires during the thermal oxidation of electroplated copper microstructures. By this method, it is possible to fabricate conductometric gas sensors with an electrical resistance dominated by a multitude of suspended CuO nanowires resulting in a huge sensor surface area. For these devices, resistance changes during exposure to different oxygen concentrations, to relative humidity and to small concentrations of the toxic gas carbon monoxide (CO) are investigated. Due to the promising sensing results and the CMOS backend compatibility of the fabrication process steps, the presented devices may find applications in integrated gas sensing devices.