P1.4 - A novel ESPI system for the analysis of static and oscillating displacements of microsystems
- 18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016
2016-05-10 - 2016-05-11
- P1 Optische Messverfahren
- K. Lietzau, C. Stollfuß, A. Foitzik - University of Applied Science Wildau, Wildau (Germany), M. Richetta - University of Rome Tor Vergata, Roma (Italy)
- 524 - 529
The presented research is focused on the adaption of the Electronic Speckle Pattern Interferometry for the analytical examination of displacements on so called MEMS. For doing so, a completely new experimental setup has been designed fitting the requirements of the optical measurement technique
as well as the analyzed microsystems. Furthermore, it also has been possible to analyze the displacement of selected microsystems and consequently verifying this proof-of-concept.