A2.2 - Silicon nanowire biosensor platform to electronically sense biomolecules in real patient samples
- AMA Conferences 2017
2017-05-30 - 2017-06-01
- Proceedings Sensor 2017
- A2 - Biosensors I
- S. Ingebrandt, D. Rani, V. Pachauri - University of Applied Sciences Kaiserslautern, Zweibrücken (Germany), M. Schwarz, T. Chien Nguyen, X. Thang Vu, A. Müller, D. Phu Tran, J. Wilhelm, J. Ka-Yan Law - RAM Group DE GmbH, Zweibrücken (Germany)
- 52 - 54
In the past 10 years we developed a top down process on 4” wafer scale for the fabrication of silicon nanowire field-effect transistor arrays (SiNW FET). The devices are realized by etching techniques from silicon-on-insulator wafers. The SiNW FET structures and the contact lines are realized in one step using nanoimprint lithography and wet anisotropic etching of silicon. We optimized our process in several fabrication rounds in terms of process yield and reproducibility of the sensor structures. This enables differential readout between electrically identical devices. We typically utilize a combined potentiometric and impedimetric readout of the devices. In several test assays it became obvious that for reliable recordings in physiological buffer solutions also the detection and the control of side parameters such as pH, temperature and ionic strength of the test solution are necessary. Our platform is now ready to enter into real patient sample tests.