B4.1 - Camera-based micro interferometer for applications in distance sensing
- AMA Conferences 2017
2017-05-30 - 2017-06-01
- Proceedings Sensor 2017
- B4 - Optical Measurement of Geometrical Quantities
- M. Will - Hochschule Darmstadt (Germany), A. Winzer, M. Schädel, J. Freitag, O. Brodersen - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany)
- 217 - 221
Interference of light provides a high precision, non-contact and fast method for measurement method for distances. However, capacitive, resistive or inductive methods dominate in the field of compact sensors. The reason is, that the interferometric system has to be precise adjusted and needs a high mechanical stability. We developed a new concept for a very small interferometric sensing setup. Therefore we combine a miniaturized laser unit, a low cost pixel detector and machine vision routines to realize a demonstrator for a Michelson type micro interferometer. Furthermore we develop a concept which allows the automatable production without individual adjustment. We demonstrate a low cost sensor smaller 1cm3 including all electronics and demonstrate distance sensing up to 30 cm and resolution in nm range.