P5.6 - SnO2 and ZnO Detectors of Hydrogen Peroxide Vapors
- AMA Conferences 2017
2017-05-30 - 2017-06-01
- Proceedings Sensor 2017
- P5 - Gas, Chemo and Biosensors
- V. Arakelyan, V. Aroutiounian, M. Aleksanyan, A. Sayunts, G. Shahnazaryan - Yerevan State University (Armenia), P. Kacer, P. Picha, J. Kovarik, J. Pekarek - University of Chemistry and Technology Prague (Czech Republic), B. Joost - Fachhochschule Nordwestschweiz, Muttenz (Switzerland)
- 714 - 719
Thin-film hydrogen peroxide vapors sensors made from SnO2<Co> and ZnO<La> were manufactured by the high-frequency magnetron sputtering method. Thicknesses of deposited doped metal oxide films were measured and its morphology was investigated. Response of the prepared sensors was measured at different concentrations of hydrogen peroxide vapors and temperatures of the sensor work body. It was found that both Co-doped SnO2 and La-doped ZnO sensors exhibit a sufficient sensitivity to 10 ppm of hydrogen peroxide vapors at the operating temperature 200° C and 220° C, respectively. It was established that the dependencies of the sensitivity on hydrogen peroxide vapors concentration at the work body temperature 150° C have a linear character for prepared structures and can be used for determination of hydrogen peroxide vapors concentration.