P2NG.16 - Spontaneous Deposition of Cobalt Oxide Nanoplates for Application to Acetone Gas Sensors
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
- P-2 - Nanomaterials for Gas Sensing
- A. Ma, D. Lee, H. Park, J. Lee, D. Kim, H. Lee - Electronics and Telecommunications Research Institute (ETRI), Daejeon (South Korea), J. Seo, K. Nam - Department of Chemistry, Mokpo National University, Yeongsan-ro, Muan-gun, Jeonnam (South Korea)
- 874 - 875
The development of sensing materials, which influence the practical gas sensing performance, is critically important for the further evolution of semiconducting metal oxide gas sensor. Especially, cobalt oxides have attracted great interest in their potential applications as solid-state sensors because of their chemical stability and semiconducting properties. In this study, we are reporting the spontaneous deposition of Co3O4 nanoplates on interdigitated electrodes and its application to gas sensors. Inducing the phase transition of h-CoO to Co(OH)2 and consecutive thermal oxidation on silicon substrate results in efficient deposition between Co3O4 and the substrate without any additional deposition processes. The efficient deposition of Co3O4 nanoplates is applicable for acetone gas sensors.