P1MM.4 - MEMS-Based Conductometric Sensors for Organic Airborne Particles
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
- P-1 - Microfluidics and MEMS for Sensing
- R. Horiuchi, N. Jimbo, T. Yamaguchi, K. Hara - Tokyo Denki University, Tokyo (Japan)
- 570 - 571
We have developed MEMS-based conductometric sensors for detection of smaller organic airborne particles such as PM2.5 and house dust which may cause a variety of diseases. A sensor is composed of two parts: a sensing element and a micro heater. Both parts were fabricated by using thin film technology, IC fabrication process and micromachining technique. The resistance of the sensor steeply decreased and then recovered to the initial value. A small increase appeared before or after the resistance decrease when a piece of PM2.5 and house dust adhered to the surface of the sensing film and burnt on it. The magnitude of the resistance decrease and the recovery time depended on the size of the organic airborne particles. In addition, the small increase of the resistance before or after the large decrease offered some information about the constituents of the particle. Thus it is possible to identify the species of the particle by the developed sensors.