P1MM.6 - Fabrication Concept for Biomimetic Microfluidic Systems

17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
Vienna, Austria
P-1 - Microfluidics and MEMS for Sensing
J. Zehetner, S. Kasemann, E. Kostal - Research Centre for Microtechnology, University of Applied Sciences, Dornbirn (Austria), G. Vanko, O. Babchenko - Institute of Electrical Engineering, Slovak Academy of Sciences, Bratislava (Slovakia)
574 - 575


This work reports the results obtained by using a technological process combining reactive ion etching (RIE) and laser ablation in the femtosecond regime. We produce membranes, micro- and nanostructured surfaces as well as 3D structures for application oriented research. Our focus is on microfluidic devices, MEMS and pressure sensors. Primarily we use AlGaN/GaN heterostructure layers grown on 4H-SiC or Si substrates, glass and ceramics. We demonstrate a novel method of direct mask writing into a thin metal layer by laser ablation for RIE compassing a micro lithography step. In order to extend the narrow ablation parameter window of our standard procedure we utilize a self-destructing etalon for a new topology selective etch mask writing process. In the subsequent RIE step we can produce up to 300μm long and in diameter 1μm to 10μm needles, 15μm hollow pillars and box like features consisting of a less than 200nm thick metal casing or pure Si. It is possible to transfer the pillars into silicon oxide and functionalize such structures by coating or filling them with gold nanoparticles or thin film semiconducting metal oxides. Some of the micro needle arrangements reveal super hydrophobic properties which makes them useful in microfluidic systems and micro bioreactors when a liquid and gas phase shall be separated to supply a gas sensor with process gas. Our previously developed membrane based pressure sensors have the potential to be fully integrated in such a system.