B6.1 - Mechatronic Design Approches for Innovative Displacement Sensor Applications
- SENSOR+TEST Conferences 2011
2011-06-07 - 2011-06-09
- Proceedings SENSOR 2011
- B6 - Dimensional Measurement
- T. Wißpeintner - MICRO-EPSILON Messtechnik GmbH & Co. KG, Ortenburg (Germany)
- 312 - 314
In the field of non-contact displacement measurement, capacitive, inductive and eddy current measurement principles are well known technologies. Being introduced way before optical measurent principles like laser based or confocal chromatic principles, they still offer advantages in diverse application settings and environmental conditions. These principles are especially relevant under certain application conditions e.g. when there is limited space to mount the sensor. An advantage of capacitive measurement is the possible linearity and high resolution which can reach the sub-nanometer domain under controlled environments. On the other hand, eddy current displacement measurement can be applied in harsh environments with dirt, humidity and high temperature ranges.
Besides these properties, new applications often require a high grade of system miniaturization, higher overall precision, system performance and immunity to environmental influence, a high level of sensor integration as well as combination of multiple sensors to achieve higher dimensional measurements or to add redundancy. Combined with demands in intelligent and efficient sensor data processing and interfacing the challenges in the domain are quite high.
A design approach to address these challenges requires the interplay of multiple disciplines like integrated electronics/sensor co-design, new packaging technologies, high precision manufacturing processes, simulation, multi-sensor integration, sensor-actuator combination and smart sensing techniques.