M1.3.4 - Miniaturized Electric Field Mill based on Lorentz Force Actuation
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- M1.3 - Physical Sensors
- Author(s)
- F. Keplinger - Technical University of Vienna, Vienna (Austria), W. Hortschitz, G. Kovac - University for Continuing Education Krems, Wiener Neustadt (Austria)
- Pages
- 58 - 59
- DOI
- 10.5162/EUROSENSORS2025/M1.3.4
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
In this paper we report on electric field sensors based on MEMS technology and the field mill conceptwith interdigitated combs. To achieve high sensitivity, the movable comb is excited by the Lorentz force in theout-of-plane direction. The sensor can be supplied with voltages below 1V, resulting in a low internal crosstalk.