M3.1.2 - Fabrication and Chracterization of Polymer-Based Ethanol Gas Sensor
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- M3.1 - Gas Sensors 2
- Author(s)
- M. M. Uddin, M. A. Islam Bhuyan, H. C. Kim - University of Ulsan, Ulsan (South Korea)
- Pages
- 84 - 85
- DOI
- 10.5162/EUROSENSORS2025/M3.1.2
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
In this study, we present the fabrication and characterization of polymer-based ethanol gas sensors developed for environmental ethanol detection. The sensors were fabricated using MEMS process. Aprotective SU-8 film was applied to the sensing area, followed by the deposition of various polymer films,including PNPD, to enhance gas-sensing performance. The base resistance was measured to evaluate the sensor’s stability. Ethanol gas responses were evaluated at 3000 ppm, 5000 ppm, and 10,000 ppm. The results confirm the potential of the fabricated sensors for reliable and effective environmental etha-nol detection.