M3.1.3 - CO2 Sensor based on Au functionalised CuO thin films
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- M3.1 - Gas Sensors 2
- Author(s)
- C. Maier, F. Sosada-Ludwikowska, L. Egger, A. Köck - Materials Center Leoben Forschung GmbH, Leoben (Austria), S. Becker, J. S. Niehaus - Fraunhofer IAP, Hamburg (Germany), K. Reichmann - Graz University of Technology, Graz (Austria)
- Pages
- 86 - 87
- DOI
- 10.5162/EUROSENSORS2025/M3.1.3
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
In this work, we present chemical nanosensors based on ultrathin CuO/Cu₂O films, which are fabricated by thermal evaporation and subsequent oxidation on SiN-based micro-hotplate chips. The sensors are tested against target gas carbon dioxide (CO₂). The CuO/Cu₂O films are functionalized with Au nano-particles (Au-NPs) stabilized with citrate. The Au-NPs clearly increase the sensor response in particular for CO₂ up to 310%.