M3.2.1 - KNN Lead-free MEMS Mirror: Thermal behavior
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- M3.2 - MOEMS
- Author(s)
- L. Mollard, C. Dieppedale, A. Hamelin, G. Le Rhun - University Grenoble Alpes, Grenoble (France)
- Pages
- 90 - 91
- DOI
- 10.5162/EUROSENSORS2025/M3.2.1
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
This paper presents the thermal behavior of KNN-based quasi-static biaxial piezoelectric MEMS mir-rors. These mirrors achieved state-of-the-art performance at ambient temperature across different MEMS mirror sizes. Specially, they reach an optical angle of up to 8.5° at 40V with a 2×2 mm² mirror. These mirrors were initially designed for LIDAR (Light Detection and Ranging) applications, using a 1550 nm pulsed laser with high incident power. This paper presents a series of experimental results on the thermal behavior of such KNN mirrors, which could be affected by high incident power or high ambient temperature. It shows that the mirror and KNN actuator thermal deformations are consistent with a first-order model, without any detrimental effects up to 10⁰°C. It also demonstrates that the mirror remains operational at this temperature, with 2D beam scanning behavior consistent with previ-ous study and no significant deviation of the spot during a 30-minutes period. These results enables a better prediction of the evolution of the KNN-mirror and 2D scanning when temperature increases for LIDAR systems or new application domains.