M3.2.2 - Characterization of Sensor Responses in 1D and 2D Scan Patterns Via AlScN-Based MEMS Mirrors
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- M3.2 - MOEMS
- Author(s)
- J. -Y. Hwang, M. Shuvho, E. Yarar, G. Wille, F. Lofink, S. Gu-Stoppel - Fraunhofer Institute for Silicon Technology, Itzehoe (Germany), M. Shuvho, F. Lofink - Christian-Albrecht-University Kiel, Kiel (Germany), F. Lofink - Kiel Nano, Surface and Interface Science KiNSIS, Kiel (Germany)
- Pages
- 92 - 93
- DOI
- 10.5162/EUROSENSORS2025/M3.2.2
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
This paper presents an in-depth characterization of sensing capabilities using AlScN-based 3D-constructed MEMS mirror device. Generating 1D line scan or 2D Lissajous scan patterns while ac-quiring sensor signals simultaneously, this research investigated the correlation between scan angle and sensor output, as well as the potential applications in feedback control.