M3.3.3 - Capacitive Excitation of Out-of-Plane Modes in MEMS Resonators with a Planar Electrode Design
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- M3.3 - Novel Technologies and Applications of Sensors 1
- Author(s)
- D. Huber, M. Gülly, G. Pfusterschmied, U. Schmid - TU Wien, Vienna (Austria)
- Pages
- 100 - 101
- DOI
- 10.5162/EUROSENSORS2025/M3.3.3
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
This paper reports on a novel planar electrode design for the capacitive excitation of out-of-plane (OOP) resonance modes in MEMS test structures to study local material parameters. A simple device fabrication process is developed consisting of 4 process steps only. As a straightforward result, the fabricated plate resonator bends in the OOP directions due to a release of the intrinsic thin film stress. The planar electrodes and the bent resonator feature electrostatic forces in the OOP direction, thus actuating the OOP vibrational modes of the resonator.