T5.3.1 - AlN piezoelectric micromachined ultrasound transducer (pMUT) for E. Coli detection
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- T5.3 - Biochemicaland Environmental Sensors 1
- Author(s)
- V. Fabre, G. Daufouy, R. Liechti, B. Fain, J. Bastien, T. Alava, S. Giroud - Univ. Grenoble Alpes, CEA, Grenoble (France), A. Laborde, F. Mathieu - Université de Toulouse, Toulouse (France)
- Pages
- 136 - 137
- DOI
- 10.5162/EUROSENSORS2025/T5.3.1
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
This work presents the fabrication process and characterization of a pMUT intended for the detection of E. Coli in liquid samples. A piezoelectric transducer in aluminium nitride is integrated in a CMOS-based process and later functionalized with specific antibodies to achieve E.Coli detection through resonance frequency tracking in air using a Vector Network Analyser.