W7.3.4 - Sensitivity Tuning and ON/OFF Switching in a Resonant Micro-accelerometer
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- W7.3 - Novel Technologies and Applications of Sensors 3
- Author(s)
- A. Zobova, M. Drizovsky, S. Krylov - Tel Aviv University, Tel Aviv (Israel)
- Pages
- 187 - 188
- DOI
- 10.5162/EUROSENSORS2025/W7.3.4
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
We report on a differential resonant accelerometer with electrostatically tunable and switchable trans-mission of the inertial load from the proof mass to the vibrating sensing beam. The device consists of a proof mass(PM) and two frames, interacting with the PM only electrostatically and connected through a compliant amplificationpseudo-mechanism to the sensing beams. Displacement of the PM due to inertial forces affects the electrostaticcoupling, the axial tension and the frequency of the sensing beams. ON/OFF switchable and tunable by voltagescale factors registered in the experiments are consistent with the model predictions.