MP69 - Simulation and Optimization of Magnetic Field Actuated MEMS-Based Metasurface for Terahertz Applications
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Poster I
- Chapter
- Theory, Modelling, Design and Testing
- Author(s)
- B. Szymanik, P. Lopato, G. Psuj, M. Herbko, M. Maciusowicz - West Pomeranian University of Technology, Szczecin (Poland), P. Kondamarri, J. Petit, A. Kovacs, U. Mescheder - Furtwangen University, Furtwangen im Schwarzwald (Germany)
- Pages
- 341 - 342
- DOI
- 10.5162/EUROSENSORS2025/MP69
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
A device based on a terahertz metasurface built from a split ring resonator array is presented. In the proposed device, part of the structural element is anchored in a silicon substrate, while the other part is movable (cantilever) and can be deformed using an external magnetic field of various intensities. Such a MEMS system, due to its variable geometry, constitutes a reconfigurable resonant structure that can be utilized e.g., as a sensor, based on detecting changes in the refractive index. In this work, the geom-etry of such a device is proposed, analyzed using numerical modeling and optimized.