MP68 - Comprehensive Mass Resolution Model for 2D Nanomechanical Resonant Sensors
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Poster I
- Chapter
- Theory, Modelling, Design and Testing
- Author(s)
- T. Platten, P. Zhang, C. Hierold - ETH Zurich, Zurich (Switzerland)
- Pages
- 339 - 340
- DOI
- 10.5162/EUROSENSORS2025/MP68
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
Nanomechanical resonators have been explored as candidates for various sensing applications. Two-dimensional (2D) nanomechanical resonators are of particular interest due to their ultralow mass and large surface-to-volume ratio, which may enable high mass resolution under vacuum conditions. However, a comprehensivemodel for calculating dynamic range (DR) and mass resolution in 2D circular nanomechanical resonators is stilllacking. In this work, we establish such a model by incorporating the effects of fringing fields and the Casimir effect.Our results indicate that fringing fields have significant impact on simulating device properties. The Casimir effectcould be of relevance for low initial strain membranes and initial electrode gaps below 10⁰ nm.