A6-a3 - New manufacturing technique based on microsystems technology for flexible polymer ultrasonic arrays
- Event
- 2025 ICU PADERBORN - 9th International Congress on Ultrasonics
2025-09-21 - 2025-09-25
Paderborn - Band
- Lectures
- Chapter
- A6-a - Micromachined Ultrasonic Transducer (CMUT and PMUT) Technologies and Applications
- Author(s)
- A. Jakob, W. Haberer, M. O. Krob, P. Weber, F. Tiefensee - Fraunhofer IBMT, Sulzbach (Germany)
- Pages
- 65 - 68
- DOI
- 10.5162/Ultrasonic2025/A6-a3
- ISBN
- 978-3-910600-08-9
- Price
- free
Abstract
This work presents a top-down manufacturing technology for the fabrication of flexible ultrasonic arrays made of polymer PMUTs. The top-down fabrication allows all contacting from the backside of the PMUTs and thus the aperture area stays free from any electrical contacts. The PMUTs of the fabricated array and test structures have center frequencies between 100 kHz and 450 kHz and an average 6 dB bandwidth of 8%. The maximum amplitude in air for any membrane was 100 nm with a sinusoidal excitation of 10 Vpp. The bending radius of the array was 10 mm.