A6-a2 - Design and Technology for Cavity SOI Piezoelectric Micromachined ultrasonic Transducers (PMUTs) with an infinite cell array design.
- Event
- 2025 ICU PADERBORN - 9th International Congress on Ultrasonics
2025-09-21 - 2025-09-25
Paderborn - Band
- Lectures
- Chapter
- A6-a - Micromachined Ultrasonic Transducer (CMUT and PMUT) Technologies and Applications
- Author(s)
- S. Mulay, C. Stöckel, F. Schwenzer, J. Bankwitz - Fraunhofer ENAS, Chemnitz (Germany)
- Pages
- 61 - 64
- DOI
- 10.5162/Ultrasonic2025/A6-a2
- ISBN
- 978-3-910600-08-9
- Price
- free
Abstract
Piezoelectric micromachined ultrasonic transducers (PMUTs) using aluminum nitride (AlN) as the active piezoelectric layer represent a powerful and compact alternative to conventional bulk piezoelectric elements. Due to their CMOS compatibility, high mechanical robustness, and strong potential for miniaturization. This paper presents a detailed insight into the design and fabrication and characterization of PMUTs utilizing cavity SOI technology and a unique infinite cell design for improved channel shape and size development.