5.2.3 - Biosensing and Healthcare Applications via Emerging Nanomaterials

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Lectures

Chapter

Emerging Sensor Materials

Author(s)

K. Yadav, R. Sankar - Academia Sinica,Taipei (Taiwan), K. Yadav - National Taiwan University,Taipei (Taiwan) and Indian Institute of Science,Bangalore (India)

Pages

171 - 172

DOI

10.5162/eurosensors2026/5.2.3

ISBN

978-3-910600-12-6

Price

free

Abstract

Amorphous indium-gallium-zinc oxide (IGZO) is attractive for active thin-film transducer stacks processed at near-room temperature. Here, dual stencil lithography with alignment was used to fabricate an IGZO thin-film-transistor (TFT) stack, without photoresist or wet etching, with a maximum process temperature of 150 °