5.2.4 - All-Dry Dual-Stencil Lithography for IGZO Thin-Film Transducers

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Lectures

Chapter

Emerging Sensor Materials

Author(s)

C. Zhang, G. Boero, J. Brugger - École Polytechnique Fédérale de Lausanne (EPFL),Lausanne (Switzerland)

Pages

173 - 174

DOI

10.5162/eurosensors2026/5.2.4

ISBN

978-3-910600-12-6

Price

free

Abstract

Chemoresistive hydrogen sensing with Pd-functionalized oxides still depends largely on empirical optimization, as the atomic-scale descriptor governing performance remains unclear. Here, we establish ensemble-defined Pd motifs with controlled nuclearity (Pd₁-Pd₃) on a nanostructured oxide and identify a non-monotonic nuclearity-performance relationship with an intermediate ensemble as the optimum. Combined experiments and density functional theory calculations show that this trend originates from nuclearity-specific hydrogen adsorption and activation rather than oxygen-centered surface descriptors.