Mo-ESM-08 - Sputtered permalloy as novel material for THz-thin film technology: Fabrication process, physical and electro-magnetic properties

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Poster

Chapter

Emerging Sensor Materials

Author(s)

P. Kondamarri, J. Petit, A. Kovacs, U. Mescheder, V. Bucher - Furtwangen University,Furtwangen im Schwarzwald (Germany), A. Badisa, M. Herbko, A. Zywica, M. Ziolkowski, P. Lopato - West Pomeranian University of Technology in Szczecin,Szczecin (Poland)

Pages

459 - 462

DOI

10.5162/eurosensors2026/Mo-ESM-08

ISBN

978-3-910600-12-6

Price

free

Abstract

Sputtered permalloy thin-film technology has been developed for terahertz (THz) filters. The current work describes its fabrication process and characterisation process. The investigated thickness range of the films is 100-1000 nm. The film surfaces and the growth of the film is analysed using FIB-SEM measurements. The magnetic behaviour is evaluated with vibrating sample magnetometer. The THz behaviour is characterised using sheet-resistance measurements followed by time domain spectroscopy (THz-TDS). It is demonstrated that films with thickness greater than 400 nm show a large out-of-plane magnetisation and a THz-shielding performance of more than -50 dB at 1 THz.