Tu-POS-02 - MEMS-based microplasma devices on glass substrates for optical emission spectroscopy

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Poster

Chapter

Photonics And Optical Sensors

Author(s)

E. Escobedo-Cousin, K. Milenko, M. Getz, D. C. H. Hoang, A. K. Herbjørnrød, E. Vereshchagina - SINTEF Digital,Oslo (Norway)

Pages

527 - 528

DOI

10.5162/eurosensors2026/Tu-POS-02

ISBN

978-3-910600-12-6

Price

free

Abstract

This work presents the design, fabrication, and characterisation of MEMS-based microplasma devices implemented on glass substrates for optical emission spectroscopy (OES). The use of glass substrates is explored to reduce substrate-related leakage currents compared to conventional silicon-based devices. Devices were fabricated using thin-film metallisation and dielectric passivation layers compatible with available processing routes. Plasma ignition was achieved at applied voltages in the kV range and excitation frequencies around 10 kHz. The device behaviour observed indicates that the use of glass substrates does not provide a clear advantage in terms of stability or lifetime under the conditions tested. The results suggest that device performance is primarily governed by dielectric properties and electrode configuration, rather than substrate conduction.