Tu-POS-07 - Equivalent Emissivity of Poly-Si, SiO₂, and SiNₓ for Accurate Heated-Membrane Optical Radiator Design

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Poster

Chapter

Photonics And Optical Sensors

Author(s)

R. F. Wolffenbuttel - Delft University of Technology,Delft (The Netherlands)

Pages

535 - 536

DOI

10.5162/eurosensors2026/Tu-POS-07

ISBN

978-3-910600-12-6

Price

free

Abstract

The temperature-dependent spectral emissivity for poly-Si, SiO 2 and SiN x of different composition have been extracted from wideband data on the index of refraction available in literature and used to obtain the temperature-dependent equivalent emissivity of these materials. The constraints of the Kirchhoff law of optics are not necessarily satisfied for these materials in combination with the thickness typically used in silicon MEMS devices, which is taken into consideration when applying the data obtained in realistic multi-layered structures.