2025 SMSI Bannerklein

B3.2 - Ultra-Low Power Pressure Sensing: A Capacitive Based MEMS Approach

Event
SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg
Band
Proceedings SENSOR 2009, Volume I
Chapter
B3 - Micro Sensors
Author(s)
M. Clifford - Kavlico Corp., Moorpark, USA
Pages
187 - 192
DOI
10.5162/sensor09/v1/b3.2
ISBN
978-3-9810993-4-8
Price
free

Abstract

In a world where wireless sensing and energy harvesting are becoming pervasive technologies, power consumption is becoming more critical for sensor design. This talk will address methods to achieve an ultra-low power consumption sensor using a capacitive sensing element and capacitive interfacing. Using Kavlico's sCAP technology as a case study, we will step through the low-power design techniques that have enabled the creation of a sensor consuming < 10µW with better than 1% full scale accuracy meeting typical automotive tire-pressure and temperature requirements. With the proposed multiplexed multi-slope procedure, a product designer has the ability to interface with multiple capacitive sensors and provide the readout on a single output line.

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