B4.2 - Analyzing Amplitude and Phase Response of a Differential Pressure Sensor Using a Dynamic Pressure Source
- Event
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg - Band
- Proceedings SENSOR 2009, Volume I
- Chapter
- B4 - Sensor Packaging
- Author(s)
- T. Kober, I. Stoehr, S. Sindlinger, R. Werthschuetzky - Technische Universität Darmstadt, Darmstadt, Germany
- Pages
- 211 - 214
- DOI
- 10.5162/sensor09/v1/b4.2
- ISBN
- 978-3-9810993-4-8
- Price
- free
Abstract
State of the art differential pressure sensors for process instrumentation are characterized by a nominal measuring range of dpN = 10 mbar at a nominal static pressure of pStat = 160 bar and an uncertainty of measurement < 2·10E−3. Environmentally robust pressure sensors based on silicon deformation bodies require static and dynamic overload protections as well as metallic media separation diaphragms. Depending on the application the silicon pressure sensor has to be protected against temperature, humidity or corrosive media, although a desired upper cut-off frequency of the complete acoustic system has to be achieved. With adapted electro mechanic network topology analysis, the amplitude and phase response is estimated for differential pressure sensors. To develop reliable overload protection systems and determine the nominal frequency range the dynamic amplitude and phase response, tested by a dynamic pressure source, is essential. Complete characterization requires a dynamic pressure source which is a development of our institute.