P1.2.7 Influence of Zinc oxide films structure on biological protein adsorption for SAW biosensors
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- P1.2 Resonant Sensors
- Author(s)
- Q. Fu, J. Deng, D. Zhou, S. Gong, S. Zhong, W. Luo - Engineering Research Center for Functional Ceramics of the Ministry of Education, Department of Electronic Science & Technology, Huazhong University of Science & Technology (P. R. China)
- Pages
- 905 - 908
- DOI
- 10.5162/IMCS2012/P1.2.7
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
Zinc oxide films used for ZnO/SiO2/Si based surface acoustic wave (SAW) Love mode sensors, were fabricated. ZnO films surface structure will affect the adsorption of the biological protein on the surface, which has an influence on the sensitivity of the SAW sensors. The structural properties of ZnO films prepared by RF magnetron sputtering have been characterized by Thornton's structure zone model. The X-ray diffraction (XRD) patterns show that the films are highly oriented with their crystallographic c-axis perpendicular to the substrate. Bovine serum albumin (BSA) was fixed to the surface of ZnO films. Then the mass of the adsorption proteins was examined by AFM to find out the optimum ZnO films structure for biological protein adsorption.