P1.8.6 All-additive Inkjet Printed Humidity and Temperature Sensors Fabricated and Encapsulated at Foil Level
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- P1.8 Sensors Based on New Materials
- Author(s)
- F. Molina-Lopez, A. Vásquez Quintero, G. Mattana, D. Briand, N. de Rooij - Ecole Polytechnique Fédérale de Lausanne (EPFL), Institute of Microengineering (IMT), Sensors, Actuators and Microsystems Laboratory (SAMLAB) (Switzerland)
- Pages
- 1122 - 1125
- DOI
- 10.5162/IMCS2012/P1.8.6
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
We present the simultaneous fabrication at foil level of ambient relative humidity (R.H.) and temperature sensors printed on flexible substrate. These sensors are based on capacitors and resistors and their combination allows the compensation of the R.H. signals variations at different temperatures. The whole fabrication of the system is carried out at foil level and involves the utilization of additive methods, namely inkjet printing and electrodeposition, as well as the final encapsulation of the sensors for protection. The sensors have been characterized and their performances analyzed. The sensitivity of the humidity sensor ranged from 1 fF / 1% R.H. in differential mode operation to 3.5 fF / 1% R.H. in single mode actuation. The thermal coefficient of temperature (TCR) of the thermoresistor was 4.3 x 10^-3 °C^-1. This work demonstrates the potential of inkjet printing in the fabrication at foil level of flexible, light-weight and cost-efficient large arrays of gas sensors.