P2.3.13 Instrument for Chemical Analysis of Liquid Samples based on a CMOS Compatible Non-Specific NDIR Microarray

Event
14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany
Chapter
P2.3 Sensors Based on Optical Techniques
Author(s)
C. Calaza, M. Salleras, N. Sabaté, J. Santander, I. Gràcia, E. Figueras, C. Cané, L. Fonseca - Instituto de Microelectrónica de Barcelona - Centro Nacional de Microelectrónica (IMB-CNM, CSIC), Campus UAB (Spain)
Pages
1486 - 1489
DOI
10.5162/IMCS2012/P2.3.13
ISBN
978-3-9813484-2-2
Price
free

Abstract

A generic purpose, compact and affordable instrument for the chemical analysis of liquid samples based on the non dispersive infrared (NDIR) scheme is presented. It comprises a detector module built from two matching arrays of CMOS compatible thermopiles and non-specific infrared filters (Fabry-Perot resonators). Each filter provides a set of transmission peaks distributed along the mid-infrared spectral range instead of a single transmission peak associated to a specific wavelength, so that each channel collects information concerning the absorption at several wavelengths, and the whole array produces a pattern with information regarding the sample absorption in the entire mid-infrared range. Strictly speaking, this instrument does not operate as a spectrometer (measuring the sample absorption as a function of wavelength), but it is an affordable alternative that makes available patterns with enclosed spectroscopic information.