2.1 - Miniaturized Infrared Spectrometer based on Planar Focusing Grating
- AMA Conferences 2015
2015-05-19 - 2015-05-21
- Proceedings IRS² 2015
- I2 - Spectroscopy and Gas Analysis
- T. May, A. Brown, E. Keßler, U. Hübner, E. Voigt, R. Riesenberg, H. Meyer - Leibniz-Institut für Photonische Technologien, Jena (Germany), A. Wuttig - Codion Optics GmbH, Jena (Germany), A. Wagner - Analytik Jena AG, Jena (Germany)
- 908 - 912
Planar gratings for applications in infrared spectrometers have been prepared with curved, non-equidistant groves by lithography and a deep etching process. The gratings feature focusing properties as well as the ability to tailor the spectral dispersion dependency, allowing a compact dispersive IR spectrometer. We report on the design, fabrication and characterization measurements. Based on these results, a concept for a compact spectrometer prototype utilizing thermoelectric detector arrays with high detectivity was developed.