2.2 - Enhanced resolution Fabry-Pérot microspectrometers
- AMA Conferences 2015
2015-05-19 - 2015-05-21
- Proceedings IRS² 2015
- I2 - Spectroscopy and Gas Analysis
- M. Ebermann, N. Neumann - InfraTec GmbH, Dresden (Germany), K. Hiller, M. Seifert - Chemnitz University of Technology, Chemnitz (Germany), M. Meinig, S. Kurth - Fraunhofer ENAS, Chemnitz (Germany)
- 913 - 917
MEMS Fabry-Perot filters (μFPF) are key elements in infrared microspectrometers. First order μFPF, as presented in previous papers , exhibit the widest tuning range but their spectral resolution is limited. Some applications, for example the analysis of hydrocarbon gases, require a higher resolution, because the absorption bands of the individual components are similar and widely overlapping. In this work μFPF are presented, which are operated in the third or fourth interference order and can therefore provide a resolution of (20…30) nm in the wavelength range (3.1…3.7) μm. Improved dynamic response of the filter and the combination with a room temperature operated PbSe photodetector allows for the fast acquisition of highly resolved spectra.