P1.7 - FEM Electromechanical Modelling of a MEMS Variable Capacitor for RF Applications
- Event
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg - Band
- Proceedings SENSOR 2009, Volume II
- Chapter
- P1 - Mechanical Sensors
- Author(s)
- P. Ture Savadkoohi, J. Iannacci, B. Margesin - Fondazione Bruno Kessler, Povo, Italy, A. Repchankova - University of Trento, Povo, Italy
- Pages
- 253 - 258
- DOI
- 10.5162/sensor09/v2/p1.7
- ISBN
- 978-3-9810993-5-5
- Price
- free
Abstract
Accurate modelling of the electromechanical behaviour of RF-MEMS devices is critical in order to predict their characteristics, and consequently how the design has to be optimized in order to overcome the trade-offs arising when dealing with specifications both in the mechanical and electrical/electromagnetic physical domains. In this work we present a complete approach to the simulation of RF-MEMS devices based on FEM (Finite Element Method) simulations performed in ANSYSTM Multiphysics.