B5.2 - Computational Methods in Coherent Optical Metrology
- AMA Conferences 2017
2017-05-30 - 2017-06-01
- Proceedings Sensor 2017
- B5 - Optical Measurement Systems I
- C. Falldorf, M. Agour, R. Bergmann - BAS-Bremer Institut für angewandte Strahltechnik, Bremen (Germany)
- 239 - 243
We demonstrate that incorporating computational methods into the measurement process enables combining beneficial properties, such as short acquisition time, insensitivity to mechanical disturbances and high accuracy. We give the two examples of digital holography, which combines fast acquisition times with high precision, and computational shear interferometry which is precise andinsensitive to mechanical vibrations at the same time.