B5.2 - Computational Methods in Coherent Optical Metrology

Event
AMA Conferences 2017
2017-05-30 - 2017-06-01
Nürnberg, Germany
Band
Proceedings Sensor 2017
Chapter
B5 - Optical Measurement Systems I
Author(s)
C. Falldorf, M. Agour, R. Bergmann - BAS-Bremer Institut für angewandte Strahltechnik, Bremen (Germany)
Pages
239 - 243
DOI
10.5162/sensor2017/B5.2
ISBN
978-3-9816876-4-4
Price
free

Abstract

We demonstrate that incorporating computational methods into the measurement process enables combining beneficial properties, such as short acquisition time, insensitivity to mechanical disturbances and high accuracy. We give the two examples of digital holography, which combines fast acquisition times with high precision, and computational shear interferometry which is precise andinsensitive to mechanical vibrations at the same time.

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