B5.3 - High-Resolution Laser-Vibrometer Microscopy
- AMA Conferences 2017
2017-05-30 - 2017-06-01
- Proceedings Sensor 2017
- B5 - Optical Measurement Systems I
- C. Rembe, R. Kowarsch - Clausthal University of Technology, Clausthal-Zellerfeld (Germany)
- 244 - 249
Precise high-frequency electronics, as for example in smart phones, require advanced filters based on micro- or even nanoelectromechanical (MEM or NEM) resonators. MEM or NEM resonators excite high resonance frequencies in the GHz range at complex 3D-modes. The vibration transfer characteristic, the mode shapes, and the energy flow of acoustic waves are important to understand electrical transfer characteristic and damping influences. Heterodyne Interferometer Microscopes are an excellent widely used tool for out-of-plane vibrations. However, frequency range and vibration amplitude resolution need to be improved. The current bandwidth is limited to approximately 600 MHz for direct demodulation of the carrier detector signal and vibration-amplitude resolution is limited to 10-30 fm/√Hz. The spatial resolution is limited to the interferometer wavelength. In this paper, we present the current limit of available systems and discuss technical solutions to breach the limits.