B5.4 - Low-coherence Interferometry for Industrial Applications
- AMA Conferences 2017
2017-05-30 - 2017-06-01
- Proceedings Sensor 2017
- B5 - Optical Measurement Systems I
- J. Krauter, T. Boettcher, M. Gronle, W. Osten - ITO, University Stuttgart (Germany)
- 250 - 254
Today, micro-electro-mechanical systems (MEMS) are found in various devices and different industries such as automotive, multimedia or medicine. It is desirable to have a 100 % performance test of each individual MEMS before more than 90 % of the production costs is incurred during the dicing, bonding and packaging procedures. Prior to these steps, all MEMS are subjected to an electrical test. We demonstrate an adapted low-coherence interferometer (LCI), that is suitable for the inspection of those MEMS structures located below the silicon cap. First LCI wavelets are shown, which are used to calculate the topography of the MEMS. Another challenging aspect of modern metrology techniques is their application for in-line inspection. Therefore, another new interferometer approach is presented in the second part of this paper, which provides a very robust, single-shot acquisition of one point with the possibility to be extended to a single-shot line acquisition.