NG.4 - H2 Gas Sensor Based on PdOx doped In2O3 Synthesized by Flame Spray Pyrolysis

17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
Vienna, Austria
New Materials for Gas Sensing
S. Phanichphant - Materials Science Research Center, Faculty of Science, Chiang Mai University, Chiang Mai (Thailand), K. Inyawilert, C. Liewhiran - Department of Physics and Materials Science, Faculty of Science, Chiang Mai University, Chiang Mai (Thailand), A. Wisitsoraat - Nanoelectronics and MEMS Laboratory, National Electronics and Computer Technology Center, National Science and Technology Development Agency, Klong Luang, Pathumthani (Thailand)
350 - 351


0-1.0wt% Pd doped In2O3 nanoparticles have been successfully synthesized in a single step by flame spray pyrolysis (FSP) technique using Indium (III) nitrate hydrate and palladium (II) acetylacetonate, as precursors dissolved in ethanol and their hydrogen sensing characteristics have been investigated. The particle and sensing film properties were analyzed by XRD, BET, TEM and XPS. The sensing films were prepared by spin coating technique. The crystallite sizes of In2O3 spherical and cubic morphologies were found to be ranging from 2 to 20 nm and Pd might form solid solution with In2O3 lattice. Gas-sensing characterization were studied at the operating temperatures ranging from 150 to 350 C in dry air. Hydrogen sensing characteristics of In2O3 nanoparticles was significantly improved as Pd content increased from 0 to 1.0wt%. The 0.50wt%Pd doped In2O3 sensing film showed an optimum H2 response of 3,526 towards 1.0vol% H2 concentration at 250 C operating temperature. In addition, PdOx doped In2O3 sensing films exhibited good selectivity towards hydrogen with improving of response and response time.