ME.2 - Miniaturized Gas Analysis System for Detection of Trace-level Volatile Organic Compound Mixtures
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
- MEMS-based Sensing
- J. Lee, H. Son, J. Lee - Department of Mechanics and Design, Kookmin University, Seoul (South Korea), S. Lim - School of Mechanical Engineering, Kookmin University, Seoul (South Korea)
- 415 - 416
This paper reports an integrated miniaturized gas analysis system (iSAAC; Integrated System for Analysis of Assorted Chemicals) for the analysis of volatile organic compounds (VOCs), which contains three components: 1) a micro preconcentrator (μ-PC), 2) a micro gas chromatography (μ-GC) and 3) a thermal conductivity detector (μ-TCD). All three components were fabricated using microelectromechanical systems (MEMS), and these were finally assembled into a 10×10×10 cm3 system platform. The iSAAC was demonstrated the successful preconcentration, separation and detection for eleven-chemicals from thirteen-VOCs mixture including non-polar alkanes (C1–C9), benzene, toluene, ethylbenzene and o-xylene (BTEX) in less than 30 mins.